Interfacial interaction behaviour analysis between Cu/Ru films and... | Download Scientific Diagram
Ultrafast Time-Resolved Pump–Probe Investigation of Nanosecond Extreme Ultraviolet-Light-Induced Damage Dynamics on B4C/Ru Nano-Bilayer Film | Nano Letters
The effect of temperature and bias on the energy storage of a Ru/YSZ/Ru thin-film device - ScienceDirect
Ru nucleation and thin film smoothness improvement with ammonia during chemical vapor deposition: Journal of Vacuum Science & Technology A: Vol 34, No 3
Catalysts | Free Full-Text | Plasma-Deposited Ru-Based Thin Films for Photoelectrochemical Water Splitting | HTML
CMP performance for Cu and Ru films as a function of inhibitor... | Download Scientific Diagram
SEM images of Ru films deposited at T dep = 198°C, and deposition... | Download Scientific Diagram
Dependence of Ru film thickness and resistivity on the amount of ALD... | Download Scientific Diagram
Enhanced selectivity of atomic layer deposited Ru thin films through the discrete feeding of aminosilane inhibitor molecules - ScienceDirect
BALD Engineering - Born in Finland, Born to ALD: Low temperature ALD of Rutheium using H2O as co-reactant
Catalysts | Free Full-Text | Plasma-Deposited Ru-Based Thin Films for Photoelectrochemical Water Splitting | HTML
Schematic models of AB-type Ru ALD using the sequences Ru(EtCp) 2 −O 2... | Download Scientific Diagram
XRD patterns of the Ru films on TaN (5 nm)/Si with different growth... | Download Scientific Diagram
![PDF] Growth and nanostructure of conformal ruthenium films by liquid-source metalorganic chemical vapor deposition by Sandwip Dey, Jaydeb Goswami, A. Das, Wei Cao, M. Floyd, Ray Carpenter · OA.mg · 10.1063/1.1576513](https://og.oa.mg/Growth%20and%20nanostructure%20of%20conformal%20ruthenium%20films%20by%20liquid-source%20metalorganic%20chemical%20vapor%20deposition.png?author=%20Sandwip%20Dey,%20Jaydeb%20Goswami,%20A.%20Das,%20Wei%20Cao,%20M.%20Floyd,%20Ray%20Carpenter "PDF] Growth and nanostructure of conformal ruthenium films by liquid-source metalorganic chemical vapor deposition by Sandwip Dey, Jaydeb Goswami, A. Das, Wei Cao, M. Floyd, Ray Carpenter · OA.mg · 10.1063/1.1576513")
PDF] Growth and nanostructure of conformal ruthenium films by liquid-source metalorganic chemical vapor deposition by Sandwip Dey, Jaydeb Goswami, A. Das, Wei Cao, M. Floyd, Ray Carpenter · OA.mg · 10.1063/1.1576513
Color online) (a) Dependence of Ru film thickness per cycle and the... | Download Scientific Diagram
SEM measured Ru film thickness vs deposition process cycle number at... | Download Scientific Diagram
Enhanced Electrical Properties of an Al-Doped TiO2 Dielectric Film on a TiN Electrode by Adopting an Atomic Layer Deposited Ru Interlayer | ACS Applied Electronic Materials
Electrochemical interaction evaluation between Cu/Ru films and... | Download Scientific Diagram
Catalysts | Free Full-Text | Plasma-Deposited Ru-Based Thin Films for Photoelectrochemical Water Splitting | HTML
Atomic Layer Deposition of Ru for Replacing Cu-Interconnects | Chemistry of Materials
Resistivity vs thickness for c-axis single crystal Ru films deposited... | Download Scientific Diagram
Unveiling Ruthenium(II) Diazadienyls for Gas Phase Deposition Processes: Low Resistivity Ru Thin Films and Their Performance in the Acidic Oxygen Evolution Reaction - Zanders - Advanced Materials Interfaces - Wiley Online Library
Coatings | Free Full-Text | Growth of Atomic Layer Deposited Ruthenium and Its Optical Properties at Short Wavelengths Using Ru(EtCp)2 and Oxygen | HTML
Ultrafast Time-Resolved Pump–Probe Investigation of Nanosecond Extreme Ultraviolet-Light-Induced Damage Dynamics on B4C/Ru Nano-Bilayer Film | Nano Letters
Area-Selective Atomic Layer Deposition of Ruthenium Using a Novel Ru Precursor and H2O as a Reactant | Chemistry of Materials
